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(Click for frequent words.) 81 substrates 72 silicon substrate 72 monolayer 71 silicon substrates 69 polymeric 68 membrane 68 dielectric 67 polymer 67 gate electrode 67 nanotube 67 sapphire substrate 67 SWCNT 66 nanowire 66 ferrite 66 dielectric layers 66 AlN 66 solder bumps 66 crystallinity 66 eutectic 65 AlGaN 65 silicon oxide 65 metallization 65 nanotubes 65 SiO 2 65 nanowires 65 indium arsenide 65 glass substrate 64 epitaxial layer 64 polyimide 64 electrode 64 flexible substrates 64 nanocrystals 64 monolayers 64 indium tin oxide ITO 64 nanocrystal 64 CNTs 64 graphene layers 63 pellicle 63 silicide 63 ZnSe 63 silicon nitride 63 graphene sheets 63 membranes 63 planar 63 oxide layer 63 silicon wafer 63 nanopillars 63 MWNT 63 dopant 63 self assembled monolayer 63 bilayer 63 photoresist 63 polymer matrix 63 polymer membrane 63 multilayers 63 tin oxide 62 compressive stress 62 QDs 62 electrically insulating 62 optically transparent 62 μm thick 62 microstructures 62 nitride 62 resistive element 62 dielectric materials 62 Si substrate 62 dielectrics 62 encapsulant 62 SWNT 62 GaN layer 62 MOS transistors 62 pentacene 62 anode 62 polydimethylsiloxane PDMS 62 SiON 62 dielectric layer 62 leadframe 62 underfill 62 semiconducting 62 transparent conductive 62 PEDOT PSS 62 TiN 62 ferroelectric 62 ferromagnetic 61 strontium titanate 61 block copolymer 61 dye molecules 61 anodic 61 SWCNTs 61 gate dielectrics 61 SWNTs 61 ZnO 61 gate dielectric 61 mesoporous 61 polymers 61 graphene 61 polymer substrate 61 conductive adhesive 61 sol gel 61 advanced leadframe 61 quantum dot 61 passivated 61 epitaxially 61 heterostructure 61 conductive polymer 61 electrochemically 61 ZnS 61 graphite oxide 61 solder paste 61 #μm [002] 61 TiO 2 61 hydrophobic 61 passivation 61 nanostructure 61 photodiode 61 nanoporous 61 silicon Si 61 micron thick 61 carbon nanotube arrays 61 silicon dioxide 61 thermally 61 GaN substrates 61 carbon nanotube 61 tensile stress 61 singulation 61 bandgap 60 thermally stable 60 titanium oxide 60 bilayers 60 carbon nanotubes 60 overmolding 60 PEDOT 60 titania 60 CMOS transistors 60 nanoparticle 60 polymerization 60 III nitride 60 5μm 60 photolithographic 60 nanotube arrays 60 graphene sheet 60 interfacial 60 dopants 60 aluminum nitride 60 anionic 60 ferromagnet 60 annealing 60 lattice mismatch 60 AlN layer 60 silicon 60 epitaxial 60 nanochannels 60 reflowed 60 polymerisation 60 agarose 60 gallium indium arsenide 60 through silicon vias 60 nanodots 60 nanocrystalline 60 GaN wafers 60 SOI wafer 60 poly Si 60 electrophoretic 60 intramolecular 60 nanostructures 60 poly L lysine 59 CdSe 59 photonic crystal 59 anneal 59 Schottky barrier 59 k dielectric 59 indium phosphide InP 59 hydrophobicity 59 transparent electrode 59 biaxial 59 polycrystalline 59 silicon nanocrystals 59 low k dielectric 59 coextruded 59 LiNbO3 59 waveguide 59 waveguides 59 nanosilicon 59 conductive epoxy 59 polydimethylsiloxane 59 dimensionally stable 59 nanoribbons 59 silica spheres 59 1μm 59 silicon nanowire 59 barium titanate 59 calcium fluoride 59 hafnium oxide 59 metallic nanoparticles 59 passivation layer 59 metallisation 59 nanofilm 59 aluminum oxide 59 nanofibres 59 nanospheres 59 organic TFTs 59 phototransistor 59 epitaxy 59 silicate glass 59 optical waveguides 59 silicon crystals 59 palladium nanoparticles 59 photodetector 59 electrodeposition 59 microporous 59 AlGaN GaN 59 P3HT 59 photoresists 58 encapsulants 58 workpiece 58 functionalized 58 anisotropic 58 vias 58 amorphous silicon 58 uniaxial 58 toroids 58 gold nanoclusters 58 submicron 58 unreacted 58 dielectric constant 58 dewetting 58 cadmium selenide 58 GaAs substrate 58 crystal lattice 58 sintered 58 wafer thickness 58 nanolayers 58 Si substrates 58 boron nitride 58 photoactive 58 graphene oxide 58 zirconium nitride 58 NiSi 58 microcavities 58 InAs 58 silicon nanoparticles 58 heterostructures 58 antireflection 58 MWCNTs 58 TFTs 58 polymer fibers 58 hollow spheres 58 walled carbon nanotube 58 catalytic reactions 58 chromophore 58 optical waveguide 58 copper indium diselenide 58 nanoparticles 58 semiconductor nanowires 58 YBCO 58 laminations 58 paramagnetic 58 quantum dots 58 UVTP 58 nonpolar 58 annealed 58 nanodiamond 58 cationic 58 indium tin oxide 58 oligomer 58 LTPS TFT 58 TSVs 58 crystalline semiconductors 58 microcavity 58 epi wafers 58 nanostructured surfaces 58 heterojunctions 58 nanobelts 58 polyaniline 58 polymer coating 58 SOI substrate 58 nanodevice 58 #.#um [001] 58 magnesium ion 58 CdS 58 nanorod 58 copper interconnects 58 GaP 58 CMOS circuits 58 crosslinked 58 #μm thick [002] 58 atomically smooth 58 semiconductor wafers 58 diffraction grating 57 polymerized 57 MOS transistor 57 insulating substrate 57 photoconductive 57 streptavidin 57 pearlite 57 wafer bonding 57 lithographically 57 antireflective coatings 57 coextrusion 57 alkynes 57 planarization 57 leadframes 57 micropores 57 exciton 57 amorphous silicon Si 57 donor acceptor 57 ultrathin layer 57 gelation 57 interposer 57 thermally conductive 57 silicon waveguide 57 lamella 57 semiconductor nanocrystals 57 intermolecular 57 dopant atoms 57 adhesive 57 PZT 57 thermally activated 57 microcrystalline 57 conjugated polymer 57 atomically thin 57 singulated 57 MWNTs 57 biomolecule 57 electrostatically 57 cadmium sulfide 57 GaN layers 57 nanolayer 57 nanometer scale 57 lipid membrane 57 chromophores 57 nanorods 57 subwavelength 57 crystallites 57 polypeptides 57 monomers 57 electroactive 57 polymer composite 57 microgel 57 nanochannel 57 conductive adhesives 57 injection moldable 57 microcapsule 57 microfabricated 57 ultraviolet curable 57 capacitances 57 FinFETs 57 FinFET 57 honeycomb structure 57 flux residues 57 silicon interposer 57 rigid substrates 57 martensite 57 ssDNA 57 adsorption 57 siloxane 57 protein adsorption 57 nanocages 57 polymer membranes 57 stilbene 57 monomer 57 thermal conduction 57 polymerizes 57 InP 57 epoxy resin 57 nanoribbon 57 microstructured 57 covalent bonding 57 AlGaAs 57 nanofibers 57 zirconium oxide 57 nucleation layer 57 molecule 57 atomic lattice 57 pMOS 57 wafer 57 antiparallel 57 electrodes 57 nanomesh 57 micrometer scale 57 aqueous 57 ferro electric 56 polyvinylidene fluoride 56 gallium phosphide 56 titanium carbide 56 colloidal 56 photocatalyst 56 nanofiber 56 thermo mechanical 56 bistable 56 nanometric 56 crosslinking 56 insulator wafers 56 zinc oxide ZnO 56 toroid 56 micrometre scale 56 ceramic substrate 56 μm 56 coated substrates 56 semiconducting properties 56 conductivity 56 semiconductive 56 lanthanum aluminate 56 Schottky diode 56 covalent bond 56 FEOL 56 manganite 56 hexamers 56 undoped 56 doped silicon 56 nanotubes nanowires 56 halide 56 vapor deposition 56 epitaxial layers 56 diffracted 56 ionic liquid 56 microchannel 56 crystal lattices 56 resin 56 Langmuir Blodgett 56 transparent conductive coatings 56 photonic bandgap 56 rigid substrate 56 ZnO nanowires 56 interdigitated 56 chalcogenide 56 polystyrene beads 56 epoxide 56 carbon nanotube CNT 56 porous substrates 56 polyethylene PEN 56 silicon dioxide SiO2 56 capacitor 56 solder pastes 56 nano crystals 56 redox reactions 56 pn junction 56 supramolecular 56 microchannels 56 cathode 56 coating 56 sulfonated 56 PIN diode 56 silicone elastomers 56 hydrogel 56 photolithography 56 passivating 56 chemically resistant 56 indium phosphide 56 glass frit 56 heterogeneous catalysts 56 μm diameter 56 adsorbed 56 coverslip 56 hydrophobic surfaces 56 catalytically active 56 lipid membranes 56 fullerene 56 photodetectors 56 debonding 56 #.#μm [001] 56 nMOS 56 microtubes 56 microwires 56 conductive ink 56 nanowire arrays 56 epiwafers 56 solder bumping 56 wirewound 56 thermoplastic polyester 56 microfluidic device 56 molecules 56 APTIV film 56 polyurethane resins 56 porous silica 56 compressive stresses 56 nonmagnetic 56 porphyrins 56 steric 56 microlenses 56 micrometers thick 56 antiferromagnetic 56 oxide particles 56 nanosprings 56 electrospun 56 nonlinear optical 56 indium gallium arsenide 56 electrically conducting 56 micrometer thick 56 nanoscopic 56 coated polyester 56 HEMTs 56 transistor 56 moldability 56 polymer nanofibers 56 nanocomposite material 56 layer graphene 56 thermal decomposition 56 macroscale 56 Fig. 3A 56 thermoplastic elastomer 56 parylene 56 CMOS compatible 56 absorbance 56 InGaN 56 ohmic contacts 56 zinc ions 56 solderable 56 bilayer graphene 56 nickel silicide 56 nitride semiconductor 56 metalized 56 elastomeric 56 electron mobility 56 AFM cantilever 56 selenide 56 conformal 56 phosphorus atom 56 #μm [001] 55 polytetrafluoroethylene PTFE 55 transistor arrays 55 nanosphere 55 interlayer 55 magnetic beads 55 polypeptide chain 55 Carbon nanotube 55 wafer dicing 55 biomolecules 55 nanomembranes 55 pore sizes 55 polymer coatings 55 Gallium arsenide 55 inorganic nanoparticles 55 micrometer sized 55 bismuth telluride 55 plasmon 55 CIGS solar cells 55 epitaxially grown 55 gold nanorods 55 conductive inks 55 viscoelastic properties 55 adsorbents 55 biologically inert 55 electrically conductive 55 BEOL 55 reactive ion 55 conduction electrons 55 solder joints 55 micrometer 55 nanopillar 55 fluorescence intensity 55 JFET 55 polymer resin 55 gasketing 55 microsphere 55 nanopatterned 55 optically 55 InGaAs 55 copper nanorods 55 photobleaching 55 silicon atoms 55 conductive coating 55 alkene 55 copolymers 55 warpage 55 SiO2 55 Grätzel cells 55 polybutadiene 55 zinc oxide nanowires 55 liposome 55 block copolymers 55 Cu interconnects 55 corrugation 55 analyte 55 metal oxide 55 moisture absorption 55 microreactors 55 insulating layers 55 zinc selenide 55 granulation tissue 55 epoxy matrix 55 vesicle 55 sub micron 55 nucleation 55 intergranular 55 microbeads 55 oxide thickness 55 isotropic 55 refractive index 55 focal adhesions 55 magnetic bead 55 dual damascene 55 multilayer 55 silica substrate 55 Substrates 55 overmolded 55 nanocluster 55 wettability 55 cuvettes 55 nematic 55 austenitic stainless steel 55 lithographic techniques 55 macromolecule 55 conformal coating 55 extrudate 55 concentration gradient 55 nanopatterns 55 epitaxial wafers 55 micelles 55 aluminum nitride AlN 55 pulsed laser deposition 55 lamellae 55 multiwalled carbon nanotubes 55 phthalocyanine 55 cobalt atoms 55 GaAs substrates 55 magnetron sputtering 55 Josephson junctions 55 microfluidic channels 55 thermoplastic polymer 55 mount SMT 55 AFM probes 55 elastic modulus 55 monodisperse 55 nonpolar GaN 55 methacrylate 55 semiconducting materials 55 superlattices 55 PMMA 55 granulate 55 micrometre 55 polymeric membrane 55 molecular sieve 55 photodiodes 55 silicone encapsulation 55 resonator 55 SDS PAGE 55 molecular sieves 55 ceria 55 walled carbon nanotubes 55 Silicon Nitride 55 oppositely charged 55 oxide semiconductors 55 processability 55 micromachined 55 desorbed 55 solder mask 55 nitride layer 55 resistor 55 epitaxial graphene 55 nanostructured 55 nanocomposite 55 tensile strain 55 silica particles 55 PbS 55 inorganic compounds 55 aqueous dispersion 55 liquid electrolyte 55 PLLA 55 CIGS Copper Indium 55 colloidal particles 55 imprint lithography 55 CIGS cells 55 silicon waveguides 55 hydride vapor phase 55 germanium substrates 55 macromolecules 54 bandgaps 54 epoxy adhesives 54 etchant 54 indium gallium 54 excitons 54 supercritical fluid 54 CNT FED 54 inorganic LEDs 54 interfacial layer 54 film transistors TFTs 54 fusible 54 nanoscale 54 alternating layers 54 Magnetic nanoparticles 54 manganese atoms 54 polysiloxane 54 PEEK OPTIMA 54 capillary tubes 54 superlattice 54 nanoparticle inks 54 cuvette 54 Fig. 1A 54 MEMS resonators 54 molecules adsorbed 54 thermal dissipation 54 Insulator SOI 54 conductance 54 chemically reactive 54 stripline 54 reflow soldering 54 viscoelasticity 54 heat sealable 54 silicon nanowires 54 dimer 54 solvent evaporation 54 flex circuits 54 MLCCs 54 conformal coatings 54 boron nitride nanotubes 54 nanomagnets 54 macroporous 54 zinc sulfide 54 SiC substrates 54 disulfide 54 Silicon wafers 54 dsRNA 54 aqueous solution 54 pcb 54 lithographic processes 54 hydrophilic polymer 54 yttrium barium copper 54 myofibroblasts 54 bypass capacitor 54 anions 54 microfluidic chips 54 polariton 54 GaN nanowires 54 silica nanoparticles 54 cuprous oxide 54 ligand 54 solvent evaporates 54 polymer substrates 54 cored wire 54 inorganic semiconductors 54 HfSiON 54 laser resonator 54 polyethylene glycol PEG 54 tetramer 54 magnesium oxide 54 mount inductors 54 oligomers 54 nanopowder 54 MWCNT 54 #nm #nm [002] 54 elute 54 aqueous inks 54 reflow 54 self assembled monolayers 54 nano scale 54 chemically inert 54 microscale 54 Bragg grating 54 electroless 54 dimensional nanostructures 54 VCSEL 54 copolymer 54 nanodroplets 54 hardcoat 54 atomically flat 54 nanocrystalline silicon 54 SOI CMOS 54 nanofabricated 54 microcracks 54 horseradish peroxidase 54 insulator substrate 54 nanofilms 54 metallized 54 radiopaque 54 zero valent iron 54 boron carbide 54 polarizers 54 lipid bilayer 54 silane 54 liquid crystalline 54 metallic nanostructures 54 fluorophore 54 vanadium dioxide 54 epitaxial deposition 54 nano particle 54 nanoholes 54 fused silica 54 thiol 54 nanometers thick 54 viral polymerase thus 54 electroplated 54 montmorillonite 54 spherical nanoparticles 54 nanostructuring 54 wirebond 54 phototransistors 54 collagen fibers 54 silicon wafers 54 fluorochrome 54 electrostatic interactions 54 2μm 54 geometries 54 SI GaAs bulk 54 microvia 54 mandrel 54 acrylic polymers 54 polyacrylate 54 parasitic inductance 54 acrylic adhesives 54 pigment particles 54 absorber layers 54 carbon nanotubes CNT 54 solutes 54 biological molecules 54 superparamagnetic 54 Czochralski 54 functionalised 54 photopolymer 54 electroless nickel 54 stoichiometric 54 aligned carbon nanotubes 54 nanosized 54 chip resistors 54 electron tunneling 54 hollow fibers 54 coercivity 54 laminate 54 eutectic solder 54 nanosheets 54 inhomogeneity 54 semiconducting material 54 elution 54 thermochromic 54 nanoparticulate 54 transmissive 54 capillary 54 heterojunction 54 ferroelectricity 54 CIGS solar cell 54 elastic deformation 54 intermetallic 54 gallium nitride 54 diode 54 UV stabilized 54 liquid crystal polymer 54 optical coatings 54 Epitaxial 54 quasicrystal 54 copper metallization 54 fibril 54 micromirror 54 hydrophobic interactions 54 yttria stabilized zirconia 54 polyelectrolyte 54 capacitive coupling 54 microlens 54 rectifier diode 54 polymer nanocomposite 54 polymeric materials 54 CMOS circuitry 54 Cadmium Telluride CdTe 54 EUV masks 54 ligands 54 PHEMT 54 epithelial cells 54 helically 54 piezoelectric ceramic 54 magnetization 54 microcrystalline silicon 54 Polyimide 54 BJTs 54 membrane pores 54 deoxygenation 54 polyimides 54 photonic devices 54 agarose gel 54 GNRs 53 GaN 53 thermosets 53 conductivities 53 helical structures 53 lidding 53 backplane 53 compressive strain 53 varistor 53 EVOH 53 graphane 53 crystallite 53 poly ethylene glycol 53 porphyrin 53 retained austenite 53 birefringence 53 resin matrix 53 polymethyl methacrylate PMMA 53 nucleosome 53 aliphatic 53 sapphire wafers 53 multi walled nanotubes 53 SOI substrates 53 wafer thinning 53 nanoantenna 53 graphene flakes 53 biosynthetic pathway 53 static dissipative 53 thermal conductivities 53 microdevices 53 crystalline structure 53 modulus 53 nanoclusters 53 boron atoms 53 lamellar 53 #S proteasome 53 ceramic capacitor 53 CIGS copper indium 53 epitaxial silicon 53 actin filament 53 SiC 53 resists abrasion 53 photocurrent 53 nano coating 53 cobalt oxide 53 nanoimprinting 53 flowability 53 radical polymerization 53 vibrational modes 53 monolithically integrated 53 terahertz waves 53 electromigration 53 e beam lithography 53 homogeneous catalysts 53 micropipette 53 Schematic illustration 53 kerf 53 CdTe 53 tantalum capacitors 53 aryl 53 silicone rubber 53 chemically bonded 53 silicone elastomer 53 lipid bilayers 53 carboxylic acid 53 electrostatic attraction 53 plasma etching 53 linearly polarized 53 resonators 53 electrostatic repulsion 53 Fig. 1a 53 outer sheath 53 hydride 53 Semiconducting 53 ultrahigh purity 53 polymer beads 53 patterning 53 nonconducting 53 chalcogenide glass 53 molten solder 53 voltage divider 53 conductive 53 single walled nanotubes 53 titanium nitride 53 fluorescent molecules 53 unpatterned 53 colloidal crystal 53 surface mountable 53 nanorings 53 galactose 53 proteinaceous 53 #um [001] 53 mesoporous silica 53 CMOS wafer 53 MgO 53 styrene butadiene 53 amide 53 encapsulant sheets 53 formability 53 perovskite 53 antireflection coating 53 5' triphosphate 53 multilayer ceramic capacitors MLCC 53 absorption spectra 53 SOI silicon 53 cyclization 53 insulating layer 53 dissipative 53 line FEOL 53 optocoupler 53 thermoformable 53 endonuclease 53 Santoprene TPV B# 53 Indium phosphide 53 nanosized particles 53 polymer microspheres 53 Joule heating 53 flexural modulus 53 rheology modifier 53 refractive indices 53 superabrasives 53 #um [002] 53 Thin Film Transistors 53 titania nanotubes 53 absorber layer 53 electrochemical reactions 53 Hysol 53 nanocubes 53 indium oxide 53 SN#C 53 vertical cavity 53 SMT LEDs