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(Click for frequent words.) 66 opto electronic 62 optoelectronic 62 semiconductor 60 microelectronic packaging 60 integrated circuits 60 optoelectronics 60 photonics 60 microelectronics 59 optoelectronic packaging 59 electro optic 59 MEMS 59 microelectronic components 58 semiconductors 58 micro optics 58 micro electromechanical systems 57 optoelectronic components 57 micromechanical devices 56 micromechanical 56 photonic devices 56 microelectronic devices 56 photonic 55 nanoelectronic 55 metrology 55 fused quartz 55 engineered substrates 55 semiconductor fabrication 55 opto electronics 55 optical components 54 microsystems 54 photonic components 54 CMOS wafer 54 semi conductor 54 InP 54 opto electronic devices 54 dielectrics 54 Carbon nanotube 53 insulator wafers 53 discrete semiconductors 53 MMICs 53 opto electrical 53 electron beam lithography 53 semiconductor optoelectronics 52 through silicon vias 52 voltage capacitor 52 nonvolatile static random 52 conductive coatings 52 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