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(Click for frequent words.) 63 highly conformal 61 dielectric 61 aluminum nitride 61 SWCNT 60 dielectrics 60 ZnS 60 polymeric 59 submicron 59 transparent conductive 59 optically transparent 59 nitride semiconductor 59 microcavities 59 metallisation 58 magnetron sputtering 58 AlN 58 silicon nitride 58 electrically insulating 58 AlGaN 58 subwavelength 58 coplanar 58 planar 58 microstructured 58 nematic 58 mask aligner 58 microcavity 58 microporous 58 self assembled monolayers 58 dopant 58 conformality 58 manganite 58 nanostructuring 57 nanocrystalline 57 metallization 57 dimensional nanostructures 57 TiN 57 electrically conductive 57 micromachined 57 hardcoat 57 tunable filter 57 fluorescence excitation 57 conductive coating 57 block copolymer 57 nanoporous 57 CdSe 57 microstructures 56 thermally stable 56 tunable 56 monolayer 56 silicide 56 silicon nanowire 56 self assembled monolayer 56 particle sizing 56 anisotropic 56 photoluminescence 56 carbon nanotube CNT 56 InSb 56 InAs 56 dopants 56 paramagnetic 56 flexible substrates 56 nanofilm 56 overmolding 56 pentacene 56 dielectric materials 56 SWNT 56 indium tin oxide ITO 56 NiSi 56 optical waveguides 56 gate dielectrics 56 nanodiamond 56 ellipsometry 56 substrate 55 HEMTs 55 silica spheres 55 vapor deposition 55 5μm 55 copper electroplating 55 hafnium oxide 55 thermally activated 55 SWIR cameras 55 collimated 55 functionalization 55 epitaxy HVPE 55 sputter deposition 55 TappingMode 55 Fabry Perot 55 nanofabricated 55 transparent electrode 55 diffractive 55 collimators 55 silicon substrate 55 nanometer sized 55 porous silicon 55 MEMS resonators 55 conductive coatings 55 monochromator 55 electrophoretic 55 ZnO 55 thermal conduction 55 nanostructure 55 anodic 55 boron carbide 55 ZnSe 55 micromachining 55 InN 55 polyimide 55 linearly polarized 55 microcrystalline 55 crosslinking 55 #um [002] 55 nonpolar 55 metallic nanostructures 55 UVTP 55 absorber layer 55 fused silica 55 mesoporous 55 tunable filters 55 substrates 55 doped silicon 55 passivating 55 polariton 55 optomechanical 55 toroidal 55 heterostructure 55 nanocrystal 54 monodisperse 54 supercritical fluid 54 dielectric layer 54 Polyimide 54 bismuth telluride 54 isotropic 54 #.#μm [001] 54 prepregs 54 #μm [001] 54 photopolymer 54 pn junctions 54 nanoimprint 54 collimator 54 AlN layer 54 ferrite 54 bilayer 54 crystallinity 54 waveguides 54 dielectric layers 54 Microfluidic devices 54 sapphire substrate 54 pulsed laser deposition 54 birefringent 54 GaN wafers 54 injection moldable 54 LiNbO3 54 singulation 54 micellar 54 electroless nickel 54 GaN layer 54 waveguide 54 nanometric 54 microfabricated 54 epitaxial layer 54 sol gel 54 chip resistors 54 QCLs 54 photolithographic 54 resistive element 54 passivation 54 macroporous 54 polymer coatings 54 CIGS solar cells 54 silicon substrates 54 micron thick 54 Tunable 54 photochromic 54 photon counting 54 nanochannels 54 conductive adhesive 54 bioimaging 54 colloidal crystal 54 extreme ultra violet 54 gate electrode 54 Si substrate 54 electrodeposition 54 photorefractive 54 photodetectors 54 photonic crystal fibers 54 conductive ink 54 superlenses 54 nano particle 54 geometries 54 electrospray 54 detector arrays 54 bioresorbable 54 μm diameter 54 transparent electrodes 53 conformal coatings 53 ultrathin layer 53 magnetron 53 nanoantenna 53 stripline 53 nanoparticulate 53 functionalized 53 mask aligners 53 quantum cascade 53 boron nitride 53 birefringence 53 germanium substrates 53 nanoribbons 53 Epitaxial 53 nanopatterning 53 rigid substrate 53 nanotube arrays 53 Electron beam 53 hardfacing 53 transparent conductive coatings 53 photoresist 53 QDs 53 thermo mechanical 53 MOS transistor 53 toroids 53 AlGaAs 53 conformal coating 53 intermetallic 53 stencil printing 53 Silicon Germanium 53 antireflection 53 conductive polymer 53 microscale 53 Si substrates 53 polymer membrane 53 liquid crystalline 53 perpendicular magnetic 53 silicon etch 53 polymer substrates 53 ablator 53 III nitride 53 Schematic illustration 53 epi wafers 53 ion traps 53 nanostructured surfaces 53 surface roughness 53 atomically smooth 53 etalon 53 DS DBR 53 aspherical 53 antimonide 53 amorphous silicon Si 53 e beam lithography 53 AFM probes 53 plasma etching 53 YBCO 53 solder pastes 53 functionalizing 53 ultraviolet curable 53 emissive 53 polymer 53 electron tunneling 53 carbon nanotube arrays 53 InGaAs 53 AlGaN GaN 53 microdevices 53 APTIV film 53 surface plasmon resonance SPR 53 composite laminates 53 Carbon nanotube 53 GaP 53 aluminum honeycomb 53 X ray spectroscopy 53 photonic crystal 53 polymer coating 53 ionisation 53 lithographic techniques 53 through silicon vias 53 semiconductor nanocrystals 53 piezoelectric ceramic 53 micromechanical 53 photonic crystal fiber 52 optically pumped 52 biaxial 52 HfSiON 52 monolithically integrated 52 multilayers 52 Aluminum Nitride 52 polyhedral 52 passivated 52 superlattice 52 solderable 52 epitaxially grown 52 carbon nanomaterial 52 nano composites 52 optical waveguide 52 nonlinear optical 52 photonic bandgap 52 PEEK OPTIMA 52 #nm #nm [002] 52 deformable mirrors 52 sub micron 52 magnetostrictive 52 Bragg grating 52 nano porous 52 walled carbon nanotube 52 optical sectioning 52 aspheric 52 eutectic 52 powder diffraction 52 optical coatings 52 CCD detector 52 di selenide CIGS 52 SWCNTs 52 nanofilms 52 silicate glass 52 #.#nm [002] 52 wavelength tunability 52 PZT 52 tribological 52 organic TFTs 52 Silicon Nitride 52 pMOS 52 imprint lithography 52 photon beam 52 anionic 52 PWBs 52 Interferometric 52 bio absorbable 52 chemiluminescence 52 electroless copper 52 electrospray ionization 52 Nd YAG laser 52 laser micromachining 52 micrometer scale 52 GaN 52 micromirror 52 zirconium oxide 52 colloidal particles 52 photonic devices 52 piezo ceramic 52 polycrystalline 52 lumpectomy cavity 52 UNCD 52 ZnO nanowires 52 ArF 52 microstrip 52 photoactive 52 2μm 52 magnetic nanoparticles 52 pellicle 52 indium gallium arsenide 52 photothermal 52 nanostructures 52 micron sized 52 gallium nitride 52 scanning electron microscopes 52 ohmic contacts 52 SiON 52 polymer matrices 52 nanosheets 52 indium arsenide 52 aluminum nitride AlN 52 passivation layers 52 silicon Si 52 nanopillar 52 electrochemical capacitors 52 interferometers 52 femtosecond lasers 52 vanadium dioxide 52 dielectrophoresis 52 silicon nanoparticles 52 SiC substrates 52 ultrashort pulses 52 titanium carbide 52 colloidal crystals 52 photolithography 52 Langmuir Blodgett 52 photonic crystals 52 lattice mismatch 52 reflective coatings 52 lamella 52 polaritons 52 thermally 52 epitaxial 52 THz radiation 52 nanoparticle 52 transistor arrays 52 zinc oxide ZnO 52 UV curable 52 supramolecular 52 single photon detectors 52 transparent conductive oxide 52 microcapsules containing 52 film transistors TFTs 52 dielectric constant 52 zinc selenide 52 solder bumps 52 nanopillars 52 conjugated polymer 52 microfluidic chips 52 zero valent iron 51 nanocapsules 51 oxide semiconductor 51 martensitic 51 balloon brachytherapy 51 UV lasers 51 μm thick 51 calcium fluoride 51 nanomagnetic 51 microreactors 51 monolithic microwave integrated 51 CIGS Copper Indium 51 submicrometer 51 GaN LEDs 51 indium gallium nitride InGaN 51 piezo actuators 51 weatherable 51 microchannel 51 microlithography 51 microlens array 51 nano structured 51 CIGS copper indium 51 multilayer 51 topological defects 51 patterning technique 51 Plasmonic 51 photocatalysts 51 CMOS transistors 51 antireflective coating 51 indium gallium arsenide InGaAs 51 conductive adhesives 51 nucleation layer 51 nanocrystals 51 semiconducting nanowires 51 nanoparticle arrays 51 liposome 51 microspheres 51 laminar 51 solder mask 51 reactive ion 51 feedthroughs 51 Parylene 51 intracavity 51 mount inductors 51 antireflection coating 51 X ray microscopy 51 ZnO nanowire 51 steric 51 opto electrical 51 nanomesh 51 microbeads 51 electron beam welding 51 MESFET 51 CMOS fabrication 51 aspherical lens 51 silicon dioxide SiO2 51 Elastomeric 51 photodiodes 51 nanocages 51 laser interferometer 51 microfluidic channels 51 protein adsorption 51 ultrasonic transducers 51 Nova NanoSEM 51 barium titanate 51 heterojunction 51 electron doped 51 laser annealing 51 laminating adhesives 51 cadmium selenide 51 LTPS TFT 51 uniaxial 51 solder bump 51 chalcogenide 51 spherical particle 51 organic photovoltaics OPV 51 polymer matrix 51 silicon waveguide 51 nitriding 51 HfO2 51 PVD coating 51 nanocubes 51 multisensor 51 optical metrology 51 nanostructured materials 51 MWNT 51 epiwafers 51 Si wafers 51 extruded profiles 51 InGaN 51 coextrusion 51 scintillator 51 monolayers 51 conformal radiotherapy 51 drug elution 51 nano crystals 51 #nm laser [001] 51 mesoscopic 51 semi permeable 51 absorption spectroscopy 51 fluoropolymer 51 electroactive polymer 51 aspheric lenses 51 bilayers 51 moisture vapor 51 x ray optics 51 planar antennas 51 nanostructured silicon 51 adhesive bonding 51 terahertz imaging 51 plasmon 51 heavy fermion 51 anomalous dispersion 51 microelectromechanical 51 photomultipliers 51 photoresists 51 nanosized 51 amorphous silicon TFT 51 spectroscopic analysis 51 nanotubes nanowires 51 electroformed 51 k dielectric 51 impurity atoms 51 graphite oxide 51 ultrafast pulses 51 polymer substrate 51 crystallites 51 wavelength tunable 51 collimating 51 nanoribbon 51 outcoupling 51 atomically thin 51 Qdot 51 CdS 51 synchrotron X ray 51 dampens vibrations 51 carbides 51 spectroscopic techniques 51 cm ² 51 inertial measurement 51 tetrahedral 51 Perkinamine 51 nanocomposite material 51 cadmium sulfide 51 Nd YAG 51 passivation layer 51 aspheric lens 51 electron diffraction 51 ferroelectrics 51 aligned carbon nanotubes 51 P3HT 51 superlattices 51 photobleaching 51 ionomer 51 polymer nanocomposite 51 rigid foams 51 MQW 51 antiferromagnetic 51 #.#um [001] 51 scanning microscopy 51 antireflective coatings 50 micro electromechanical 50 1μm 50 TFTs 50 circuit MMIC 50 AFMs 50 semiconducting properties 50 wettability 50 ferrites 50 semiconducting materials 50 solution processible 50 YAG lasers 50 K dielectrics 50 differential scanning calorimetry 50 nanocoatings 50 fluorescence detection 50 diffraction gratings 50 nano particulate 50 GaN substrates 50 lithium niobate 50 weldability 50 TMOS display 50 photodiode 50 GaAs substrate 50 cuvette 50 PLLA 50 rigid polyurethane foam 50 SiO 2 50 elute 50 #μm [002] 50 wafer metrology 50 functionalised 50 x ray beam 50 Photonic crystals 50 polysiloxane 50 liquid crystal polymer 50 chemisorption 50 wafer bonder 50 indium oxide 50 indium phosphide InP 50 dopant atoms 50 micro machining 50 airfoils 50 solution processable 50 microdevice 50 metallic alloys 50 nanogels 50 emission spectroscopy 50 spherical particles 50 micro fluidic 50 rotationally symmetric 50 CNTs 50 vapor retarders 50 titanium alloy 50 nanochannel 50 nano coatings 50 piezoresistive 50 mechanical polishing CMP 50 Chemical Vapor Deposition CVD 50 semiconductor quantum dots 50 photoactivation 50 μm 50 honeycomb structure 50 micrometer sized 50 inkjet printhead 50 HRTEM 50 bond aligner 50 microgel 50 Josephson junctions 50 nanobelts 50 thermo compression 50 interfacial 50 NWs 50 femtosecond pulse 50 fiber optic gyroscopes 50 insulating substrate 50 rheological 50 solder bumping 50 MAX# integrates 50 stiction 50 nanowire transistors 50 nanotubes 50 TOSAs 50 donor acceptor 50 backside metallization 50 CNT FED 50 inherently flame retardant 50 antireflection coatings 50 microlasers 50 epitaxial structures 50 anneal 50 nanoimprint lithography NIL 50 UHMW 50 fluorosilicone 50 metalorganic chemical vapor deposition 50 inhomogeneity 50 layer graphene 50 diffractive optical elements 50 silicone gasket 50 optically coupled 50 metalized 50 electron optics 50 naturally occurring nanotubes 50 carbon nanotube composite 50 hydride vapor phase 50 CIGS photovoltaics 50 terahertz waves 50 parylene 50 dimensionally stable 50 low k dielectric 50 ultrananocrystalline diamond 50 strontium titanate 50 scanning electron 50 capacitively coupled 50 RO membrane 50 cathodic 50 enhanced Raman scattering 50 interferometry 50 polydimethylsiloxane PDMS 50 chemically resistant 50 Schematic representation 50 MOS transistors 50 etching DRIE 50 4H SiC 50 microsphere 50 microcapsule 50 agarose 50 nonconductive 50 thickness uniformity 50 beamsplitters 50 porous membrane 50 toroid 50 EBDW 50 emission wavelength 50 nanocomposite materials 50 plasma etch 50 photoconductive 50 coating thickness 50 photoemission 50 planar waveguide 50 finely dispersed 50 thermoplastic polyester 50 micro optics 50 phototransistors 50 nanoliter 50 MWNTs 50 photon flux 50 nanoarrays 50 wirewound 50 metallic substrates 50 ferromagnetic 50 titania 50 weld seams 50 hollow spheres 50 titanium nitride 50 ultrafast lasers 50 nanoprobe 50 FinFET 50 induced fluorescence 50 curved surfaces 50 multijunction 50 photon energies 50 coated polyester 50 fluidic 50 Vertical Cavity Surface Emitting 50 InGaAs InP 50 heterostructures 50 nanoparticle inks 50 photodetector 50 nanodots 50 nitrides 50 organic photovoltaics 50 electrochemical sensor 50 Semiconducting 50 ferroelectric 50 #nm wavelength [001] 50 photopolymers 50 intensity modulated 50 BEOL 50 bandgap 50 nanoflow 50 NMR spectra 50 nanolayers 50 silicon photovoltaics 50 carbon nanostructures 50 MetaPULSE 50 nanofluidic 50 thermal impedance 50 photomultiplier tubes 50 pore sizes 50 pre preg 50 reflectometry 50 thermoplastic composite 50 photomultiplier 50 heterogeneous catalysts 50 SWNTs 50 polymeric membrane 50 nanotube sheets 50 titanate 50 radical polymerization 50 antireflective 50 microcapillary 50 cryogenically cooled 50 atomic lattice 50 ultrasonics 50 particle dispersion 50 nanopositioning stages 50 silicone encapsulation 50 nanosilicon 50 PIN diode 50 ion beams 50 osteoconductive 50 porous silica 50 UV VIS 50 surface plasmon 50 aluminum oxide 50 thermochromic 50 epitaxial graphene 50 superhydrophobic 50 interfacial layer 50 aluminum arsenide 50 ETFE 50 transmural 50 reticles 50 ceramic substrate 50 femtosecond laser pulses 50 gate dielectric 50 VICTREX PEEK polymer 50 multiaxis 50 PECVD 50 low k dielectrics 50 wafer prober 50 LPCVD 50 sintered metal 50 tantalum nitride 50 ablates 50 dye sensitized 50 polymer scaffolds 50 cordierite 49 catalytically active 49 invisibility cloaking 49 FinFETs 49 gallium indium arsenide 49 HAp 49 resistive capacitive 49 x ray diffraction 49 photomasks 49 galvanometer 49 nano crystalline 49 coextruded 49 nanomagnets 49 biohybrid 49 amorphous silicon 49 electrostatically 49 selenide 49 CFD modeling 49 PbS 49 linewidths 49 selectivities 49 electroless 49 bucky balls 49 HID lamp 49 silicon MEMS 49 diffraction pattern 49 nanofibre 49 nanoantennas 49 potentiometric 49 THz frequencies 49 thermomechanical 49 magnetic nanoparticle 49 microbolometers 49 BioSilicon 49 martensite 49 drug eluting coating 49 rheology modifier 49 lamellar 49 nanolithography 49 leadframe 49 spectral imaging 49 electron scattering 49 optically 49 ceramic composites 49 #μm thick [002] 49 perovskite 49 lithographically patterned 49 regenerable 49 lithographic processes 49 diffusive 49 wafer thinning 49 photon beams 49 DPSS lasers 49 dimensional electron 49 corona discharge 49 ferrofluid 49 nano engineered 49 voltage divider 49 antiferromagnets 49 diffractive optics 49 Force Microscopy 49 bilayer graphene 49 collinear 49 metallic interconnects 49 laser irradiation 49 x ray scattering 49 electron mobility 49 defoaming 49 solventless 49 vanadate 49 Indium Phosphide 49 cored wire 49 photoelectron 49 microscopy techniques 49 CMOS compatible 49 tin Sn 49 Flip Chip 49 infrared emitters 49 copper metallization 49 deformable mirror 49 semiconductor nanowires 49 flexible monolithically integrated 49 conductive epoxy 49 polymer nanofibers 49 optical isolators 49 stereolithography 49 laser welding 49 amperometric 49 encapsulant 49 thermoelectric cooler 49 nano coating 49 C# fullerenes 49 z axis 49 resonators 49 laminations 49 PolyJet Matrix TM 49 vibrational spectroscopy 49 Metamaterial 49 Alchimer 49 wafer bonding 49 inorganic LEDs 49 fused quartz 49 CMOS wafers 49 delaminations 49 nanocomposite 49 Photolithography 49 pyroelectric 49 spherical 49 cuprate 49 Schottky 49 microlens arrays 49 silica nanoparticles 49 quasicrystal 49 metallic foils 49 melt viscosity 49 ab initio calculations 49 cadmium chloride 49 autosampler 49 uncooled infrared 49 Gallium Arsenide 49 dielectric etch 49 chip optical interconnects 49 gallium selenide 49 liposomes 49 vitamin D analogs 49 collimated beam 49 dispersive 49 impedance measurements 49 microtubes 49 inelastic scattering 49 pulsed laser 49 surface mountable 49 static dissipative 49 yttrium barium copper 49 oxynitride 49 GaN nanowires 49 Bessel beam 49 superconducting qubit 49 Amorphous silicon 49 gallium nitride GaN 49 Metallization 49 dual damascene 49 polymer membranes 49 silicon oxide 49 tin oxide 49 electron transistors 49 thermal ablation 49 5nm 49 quantum cascade lasers 49 VCSELs 49 Leica M# 49 aqueous dispersion 49 nanoimprinting 49 planarization 49 fluorescence spectroscopy 49 UV NIL 49 scatterometry 49 Fig. 1a 49 BJTs 49 aluminum gallium nitride 49 vertical cavity 49 focused ion beam 49 magnetisation 49 PaxScan 49 #.#mm diameter [002] 49 silicon oxynitride 49 droplet formation 49 oxide thickness 49 numerical aperture 49 electrostatic interactions 49 nanospheres 49 feedthrough 49 advanced leadframe 49 SOI CMOS 49 transmissive 49 polymer composite 49 hermetic packaging 49 azimuthal 49 photoelectrochemical 49 rheometer 49 biocompatible 49 wave soldering 49 thermal annealing 49 supercontinuum generation 49 thermal conductivity 49 vapor permeable 49 micrometer thick 49 quadrupole 49 highly collimated 49 solder paste printing 49 nano imprint lithography 49 cavitation 49 crystalline Si 49 ion beam 49 Chemical Vapor Deposition 49 piezo resistive 49 tantalum capacitor 49 Ultem 49 Ascentis Express 49 microstructural 49 #μ 49 nanocomposites 49 electrically conducting 49 vesicle fusion 49 microlens 49 confocal laser scanning 49 saturable